Magnetohydrodynamic velocity profile measurement for microelectromechanical systems micro-robot design

Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications

This paper presents an in-plane sandwich nano-g microelectromechanical systems (MEMS) accelerometer. The proof-mass fabrication is based on silicon etching through technology using inductive coupled plasma (ICP) etching. The capacitive detection system, which employs the area-changing sensing method, combines elementary capacitive pickup electrodes with periodic-sensing-array transducers. In or...

Microelectromechanical systems (MEMS): fabrication, design and applications

Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many unique MEMS-specific micromachining processes are being developed. In MEMS, a wide variety of transduction mechanisms ca...

A Hierarchical Circuit-Level Design Methodology for Microelectromechanical Systems

Gary K. Fedder and Qi Jing1 Abstract A circuit-level methodology for hierarchical design and nodal simulation of microelectromechanical systems (MEMS) is presented. A layout-based schematic view is introduced as a geometrically intuitive MEMS representation that is transformed into a schematic suitable for behavioral simulation. As examples of the design methodology, suspended-MEMS inertial sen...

Path Following and Velocity Optimizing for an Omnidirectional Mobile Robot

In this paper, the path following controller of an omnidirectional mobile robot (OMR) has been extended in such a way that the forward velocity has been optimized and the actuator velocity constraints have been taken into account. Both have been attained through the proposed model predictive control (MPC) framework. The forward velocity has been included into the objective function, while the a...

Pressure-driven flow of a micro-polar fluid: measurement of the velocity profile